| 000 | 02152naa a2200229uu 4500 | ||
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| 001 | 8071616112010 | ||
| 003 | OSt | ||
| 005 | 20190211164018.0 | ||
| 008 | 080716s2008 xx ||||gr |0|| 0 eng d | ||
| 100 | 1 |
_aYANG, Chyan _935024 |
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| 245 | 1 | 0 | _aIncreasing detectability in semiconductor foundry by multivariate statistical process control |
| 260 |
_aOxfordshire, UK : _bTaylor & Francis, _cMay-June 2008 |
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| 520 | 3 | _aQuality has become a key determinant of success in all aspects of modern industries. It is especially prominent in the semiconductor industry. This paper reviews the contributions of statistical analysis and methods to modern quality control and improvement. The two main areas are statistical process control (SPC) and experimentation. The statistical approach is placed in the context of recent developments in quality management, with particular reference to the total quality movement. | |
| 520 | 3 | _aIn SPC, Hotelling T2 has been applied in laboratories with good result; however, it is rarely used in mass production, especially in the semiconductor industry. An advance process control (APC) of R&D study, involving Hotelling T2 and principal component analysis (PCA), is performed on a high density plasma chemical vapour deposition (HDP CVD) equipment in the 12-inch wafer fab. The design of experiment (DOE) of gas flow and RF power effects is used to work the feasibility of PCA for SPC and examine the correlation among tool parameters. In this work, the Hotelling T2 model is shown to be sensitive to variations as small as (+/ - )5% in the tool parameters. Compared with classical PDCA and qualitative analysis, applying statistical in process control is more effective and indeed necessary. This model also is especially suitable to the semiconductor industry | |
| 700 | 1 |
_aCHANG, Chao-Jung _935025 |
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| 700 | 1 |
_aNIU, Han-Jen _935026 |
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| 700 | 1 |
_aWU, Hsueh-Chang _935027 |
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| 773 | 0 | 8 |
_tTotal quality management & business excellence _g19, 5-6, p. 429-440 _dOxfordshire, UK : Taylor & Francis, May-June 2008 _xISSN 14783363 _w |
| 942 | _cS | ||
| 998 |
_a20080716 _b1611^b _cTiago |
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| 998 |
_a20081209 _b1017^b _cZailton |
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| 999 |
_aConvertido do Formato PHL _bPHL2MARC21 1.1 _c27063 _d27063 |
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| 041 | _aeng | ||